000 01270cam a2200313 a 4500
001 4908719
003 OSt
005 20241025120245.0
008 941220s1995 nyua b 001 0 eng
010 _a 94047002
020 _a0070585024
020 _a0071139133 (International ed.)
040 _aDLC
_cChuka University Library
_dChuka University Library
050 0 0 _aTA 418.9
_b.S65 1995
100 1 _aSmith, Donald L.
_q(Donald Leonard),
_d1944-
_91493
245 1 0 _aThin-film deposition :
_bprinciples and practice /
_cDonald L. Smith.
260 _aNew York :
_bMcGraw-Hill,
_c1995.
300 _axxiii, 616 pages :
_billustrations ;
_c24 cm.
504 _aIncludes bibliographical references and index.
650 0 _aThin films.
_91494
650 0 _aVapor-plating.
_91495
650 0 _aThin film devices.
_91496
650 0 _aChemical vapour deposition
_91497
856 4 1 _3Table of contents
_uhttp://www.loc.gov/catdir/toc/mh022/94047002.html
856 4 2 _3Contributor biographical information
_uhttp://www.loc.gov/catdir/enhancements/fy1012/94047002-b.html
906 _a7
_bcbc
_corignew
_d1
_eocip
_f19
_gy-gencatlg
942 _2lcc
_cBK
_01
999 _c1195
_d1195