| 000 | 01270cam a2200313 a 4500 | ||
|---|---|---|---|
| 001 | 4908719 | ||
| 003 | OSt | ||
| 005 | 20241025120245.0 | ||
| 008 | 941220s1995 nyua b 001 0 eng | ||
| 010 | _a 94047002 | ||
| 020 | _a0070585024 | ||
| 020 | _a0071139133 (International ed.) | ||
| 040 |
_aDLC _cChuka University Library _dChuka University Library |
||
| 050 | 0 | 0 |
_aTA 418.9 _b.S65 1995 |
| 100 | 1 |
_aSmith, Donald L. _q(Donald Leonard), _d1944- _91493 |
|
| 245 | 1 | 0 |
_aThin-film deposition : _bprinciples and practice / _cDonald L. Smith. |
| 260 |
_aNew York : _bMcGraw-Hill, _c1995. |
||
| 300 |
_axxiii, 616 pages : _billustrations ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aThin films. _91494 |
|
| 650 | 0 |
_aVapor-plating. _91495 |
|
| 650 | 0 |
_aThin film devices. _91496 |
|
| 650 | 0 |
_aChemical vapour deposition _91497 |
|
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/mh022/94047002.html |
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/enhancements/fy1012/94047002-b.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2lcc _cBK _01 |
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| 999 |
_c1195 _d1195 |
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