000 00374nam a2200133Ia 4500
008 230222s9999||||xx |||||||||||||| ||und||
020 _a0 07 058502 4
040 _cChuka University Library
050 _aSBL TA 418.9
_bS65 1995
100 _aSmith, Donald L.
245 0 _aThin-Film deposition:principles and practice
260 _aMcGrawhill
_bBoston
_c1995
942 _cBK
999 _c11266
_d11266