TY  - BOOK
AU  - Smith,Donald L.
TI  - Thin-film deposition: principles and practice 
SN  - 0070585024
AV  - TA 418.9 .S65 1995
PY  - 1995///
CY  - New York
PB  - McGraw-Hill
KW  - Thin films
KW  - Vapor-plating
KW  - Thin film devices
KW  - Chemical vapour deposition
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/mh022/94047002.html
UR  - http://www.loc.gov/catdir/enhancements/fy1012/94047002-b.html
ER  -