Smith, Donald L. 1944-
Thin-film deposition : principles and practice /
Donald L. Smith.
- New York : McGraw-Hill, 1995.
- xxiii, 616 pages : illustrations ; 24 cm.
Includes bibliographical references and index.
0070585024 0071139133 (International ed.)
94047002
Thin films.
Vapor-plating.
Thin film devices.
Chemical vapour deposition
TA 418.9 / .S65 1995