Smith, Donald L. 1944-

Thin-film deposition : principles and practice / Donald L. Smith. - New York : McGraw-Hill, 1995. - xxiii, 616 pages : illustrations ; 24 cm.

Includes bibliographical references and index.

0070585024 0071139133 (International ed.)

94047002


Thin films.
Vapor-plating.
Thin film devices.
Chemical vapour deposition

TA 418.9 / .S65 1995